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學術出版;;Publications
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單晶CVD薄膜和熔化成長法製程中的不穩定熱流與使其穩定之研究---總計畫(III)
單晶CVD薄膜和熔化成長法製程中的不穩定熱流與使其穩定之研究---總計畫(III)
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872212E009028.pdf
(289.09 KB)
Date
1998
Authors
林清發
LIN TSING-FA
Journal Title
Journal ISSN
Volume Title
Publisher
DOI
Abstract
Description
Keywords
浮力
,
不穩定流
,
半導體
,
化學氣相沉積法
,
薄膜單晶
,
Buoyancy
,
Unstable flow
,
Semiconductor
,
Chemical vapor deposition (CVD)
,
Thin film single crystal
Citation
URI
https://www.grb.gov.tw/search/planDetail?id=353158&docId=63026
https://ir.lib.nycu.edu.tw/handle/11536/95032
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