導電薄膜之雷射微細加工技術研發

dc.contributor.author	郭正次	en_US
dc.contributor.author	KUO CHENG-TZU	en_US
dc.contributor.department	國立交通大學材料科學工程研究所	zh_TW
dc.date.accessioned	2014-12-13T10:39:12Z
dc.date.available	2014-12-13T10:39:12Z
dc.date.issued	1996	en_US
dc.description.sponsorship	行政院國家科學委員會	zh_TW
dc.identifier.govdoc	NSC85-2216-E009-010	zh_TW
dc.identifier.uri	https://www.grb.gov.tw/search/planDetail?id=206853&docId=36545	en_US
dc.identifier.uri	https://ir.lib.nycu.edu.tw/handle/11536/96199
dc.language.iso	zh_TW	en_US
dc.subject	選擇性沈積	zh_TW
dc.subject	選擇性蝕刻	zh_TW
dc.subject	微細加工	zh_TW
dc.subject	薄膜	zh_TW
dc.subject	Selective deposition	en_US
dc.subject	Selective etching	en_US
dc.subject	Micromachining	en_US
dc.subject	Thin film	en_US
dc.title	導電薄膜之雷射微細加工技術研發	zh_TW
dc.title	Laser Micromachining of the Conduction Films	en_US
dc.type	Plan	en_US

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