Micro actuated grating for multi-beam optical pickups - art. no. 66200I
| dc.citation.epage | I6200 | en_US |
| dc.citation.spage | I6200 | en_US |
| dc.citation.volume | 6620 | en_US |
| dc.contributor.author | Lee, Chi-Hung | en_US |
| dc.contributor.author | Chiu, Yi | en_US |
| dc.contributor.author | Shieh, Han-Ping D. | en_US |
| dc.contributor.department | 光電工程學系 | zh_TW |
| dc.contributor.department | Department of Photonics | en_US |
| dc.date.accessioned | 2014-12-08T15:10:27Z | |
| dc.date.available | 2014-12-08T15:10:27Z | |
| dc.date.issued | 2007 | en_US |
| dc.description.abstract | A stress-induced curved micro actuator with a grating attached at the end is demonstrated for recordable optical storage applications. The actuator and the grating were fabricated using a two-layer poly-silicon and one-layer silicon nitride micro-machining process. Three diffracted beams with equal intensity from the grating were generated when a voltage is applied to the actuator to switch its position. The single-beam and multi-beam configurations can be used for writing and reading data in the disc, respectively. | en_US |
| dc.identifier.doi | 10.1117/12.738632 | en_US |
| dc.identifier.isbn | 978-0-8194-6762-1 | en_US |
| dc.identifier.issn | 0277-786X | en_US |
| dc.identifier.journal | Optical Data Storage 2007 | en_US |
| dc.identifier.uri | http://dx.doi.org/10.1117/12.738632 | en_US |
| dc.identifier.uri | https://ir.lib.nycu.edu.tw/handle/11536/7990 | |
| dc.identifier.wosnumber | WOS:000250199900010 | |
| dc.language.iso | en_US | en_US |
| dc.subject | binary grating | en_US |
| dc.subject | actuator | en_US |
| dc.subject | micro-machining | en_US |
| dc.subject | optical pickup | en_US |
| dc.title | Micro actuated grating for multi-beam optical pickups - art. no. 66200I | en_US |
| dc.type | Proceedings Paper | en_US |