近場光纖探針
| dc.citation.patentcountry | TWN | zh_TW |
| dc.citation.patentnumber | I267655 | zh_TW |
| dc.contributor.author | 趙遠鳳 | en_US |
| dc.contributor.author | 楊宗哲 | en_US |
| dc.contributor.author | 蔡定平 | en_US |
| dc.date.accessioned | 2014-12-16T06:17:07Z | |
| dc.date.available | 2014-12-16T06:17:07Z | |
| dc.date.issued | 2006-12-01 | en_US |
| dc.description.abstract | 本創作係一近場光纖探針，藉由改良傳統式裸光纖探針或鍍金屬膜光纖探針的收光或送光特性，經由適當比例的鍍膜於裸光纖探針上，使增強其光纖探針的收光或送光的通光效率，可擴展應用至電子束及微顯影技術應用於半導體之精密製程的應用上。 | zh_TW |
| dc.identifier.govdoc | G02B023/26 | zh_TW |
| dc.identifier.uri | https://ir.lib.nycu.edu.tw/handle/11536/106295 | |
| dc.language.iso | zh_TW | en_US |
| dc.title | 近場光纖探針 | zh_TW |
| dc.type | Patents | en_US |