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寄生氧化層對具有原子層平坦之超薄氧化層的影響

dc.contributor.author荊鳳德en_US
dc.contributor.authorCHIN ALBERTen_US
dc.contributor.department交通大學電子工程系zh_TW
dc.date.accessioned2014-12-13T10:36:25Z
dc.date.available2014-12-13T10:36:25Z
dc.date.issued2000en_US
dc.description.sponsorship行政院國家科學委員會zh_TW
dc.identifier.govdocNSC89-2215-E009-071zh_TW
dc.identifier.urihttps://www.grb.gov.tw/search/planDetail?id=542127&docId=99589en_US
dc.identifier.urihttps://ir.lib.nycu.edu.tw/handle/11536/93917
dc.language.isozh_TWen_US
dc.subject寄生氧化層zh_TW
dc.subject超薄氧化層zh_TW
dc.subject遷移率zh_TW
dc.subjectNative oxideen_US
dc.subjectUltra-thin oxideen_US
dc.subjectMobilityen_US
dc.title寄生氧化層對具有原子層平坦之超薄氧化層的影響zh_TW
dc.titleThe Effect of Native Oxide on Ultra-Thin Oxide (1.5-2.5nm) with Atomically Smooth Interfaceen_US
dc.typePlanen_US

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