複晶矽薄膜電晶體相關技術之開發與研究---子計畫一：複晶矽薄膜電晶體之薄膜成長技術之研究

dc.contributor.author	鄭晃忠	en_US
dc.contributor.department	國立交通大學電子工程學系	zh_TW
dc.date.accessioned	2014-12-13T10:39:05Z
dc.date.available	2014-12-13T10:39:05Z
dc.date.issued	1996	en_US
dc.description.sponsorship	行政院國家科學委員會	zh_TW
dc.identifier.govdoc	NSC85-2215-E009-035	zh_TW
dc.identifier.uri	https://www.grb.gov.tw/search/planDetail?id=234557&docId=43052	en_US
dc.identifier.uri	https://ir.lib.nycu.edu.tw/handle/11536/96065
dc.language.iso	zh_TW	en_US
dc.subject	複晶矽薄膜電晶體	zh_TW
dc.subject	複晶矽薄膜	zh_TW
dc.subject	快速退火處理	zh_TW
dc.subject	再結晶	zh_TW
dc.subject	Polysilicon thin film transistor	en_US
dc.subject	Polysilicon thin film	en_US
dc.subject	Rapid thermalprocess	en_US
dc.subject	Recrystallization	en_US
dc.title	複晶矽薄膜電晶體相關技術之開發與研究---子計畫一：複晶矽薄膜電晶體之薄膜成長技術之研究	zh_TW
dc.title	Growth Technology of Polycrystalline Silicon Films for Poly-Si Thin-Film Transistors	en_US
dc.type	Plan	en_US

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