METHOD OF GROWING DIAMOND THIN FILM
| dc.citation.patentcountry | USA | zh_TW |
| dc.citation.patentnumber | 20140209014 | zh_TW |
| dc.contributor.author | CHANG Li | en_US |
| dc.contributor.author | CHEN Yu-Chang | en_US |
| dc.contributor.author | CHEN Jr-Yu | en_US |
| dc.date.accessioned | 2014-12-16T06:14:46Z | |
| dc.date.available | 2014-12-16T06:14:46Z | |
| dc.date.issued | 2014-07-31 | en_US |
| dc.description.abstract | The present invention is directed to a method of growing thin film diamond. Since there are micro-grooves formed between internal grains of the heterogeneous substrate during lateral epitaxy growth, diamond seeds are allowed to be embedded in the micro-grooves; surface damage caused by scratching method or seeding method also can be prevented. As a result, a continuous diamond thin film with uniform thickness and high quality can be obtained. | zh_TW |
| dc.identifier.govdoc | C30B025/18 | zh_TW |
| dc.identifier.govdoc | C30B025/10 | zh_TW |
| dc.identifier.govdoc | C30B025/06 | zh_TW |
| dc.identifier.govdoc | C01B031/06 | zh_TW |
| dc.identifier.uri | https://ir.lib.nycu.edu.tw/handle/11536/104887 | |
| dc.language.iso | zh_TW | en_US |
| dc.title | METHOD OF GROWING DIAMOND THIN FILM | zh_TW |
| dc.type | Patents | en_US |