Fabrication of Optical Waveguide Devices Using Electromagnetic Assisted Nanoimprinting
| dc.citation.epage | + | en_US |
| dc.citation.spage | 910 | en_US |
| dc.citation.woscount | 1 | en_US |
| dc.contributor.author | Weng, Yung-Jin | en_US |
| dc.contributor.author | Weng, Yung-Chun | en_US |
| dc.contributor.author | Wong, Yong-Cheng | en_US |
| dc.contributor.author | Yang, Sen-Yeu | en_US |
| dc.contributor.author | Liu, Hsu-Kang | en_US |
| dc.contributor.department | 機械工程學系 | zh_TW |
| dc.contributor.department | Department of Mechanical Engineering | en_US |
| dc.date.accessioned | 2017-04-21T06:49:32Z | |
| dc.date.available | 2017-04-21T06:49:32Z | |
| dc.date.issued | 2009 | en_US |
| dc.description.abstract | A creative technology was used in this research. Using the PDMS flexible mold magnetic powder method to transmit imprinting, and by combining the special characteristics of the soft lithography, polymethylmethacrylate (PMMA), and electromagnetic Plate uniform control pressing technology, researching the use of magnetic flexible mold imprinting technology to produce the optical waveguide devices, so as to allow the usage and the technology of micro hot embossing or nanoimprinting more mature. | en_US |
| dc.identifier.doi | 10.1109/ICSPS.2009.179 | en_US |
| dc.identifier.isbn | 978-0-7695-3654-5 | en_US |
| dc.identifier.journal | PROCEEDINGS OF THE 2009 INTERNATIONAL CONFERENCE ON SIGNAL PROCESSING SYSTEMS | en_US |
| dc.identifier.uri | http://dx.doi.org/10.1109/ICSPS.2009.179 | en_US |
| dc.identifier.uri | https://ir.lib.nycu.edu.tw/handle/11536/135010 | |
| dc.identifier.wosnumber | WOS:000275782600189 | en_US |
| dc.language.iso | en_US | en_US |
| dc.subject | optical waveguide | en_US |
| dc.subject | magnetic powder | en_US |
| dc.subject | magnetic-flexible mold | en_US |
| dc.subject | Electromagnetic control technology | en_US |
| dc.subject | Nanoimprinting technology | en_US |
| dc.title | Fabrication of Optical Waveguide Devices Using Electromagnetic Assisted Nanoimprinting | en_US |
| dc.type | Proceedings Paper | en_US |
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