Layer-by-Layer Copper Photonic Crystals for Near Infrared Spectral Region

Abstract

We selected copper as the material to form the 3D structures with feature sizes of 0.4 mu m to study its desirable optical properties at near infrared wavelengths from using the high compatible process of damascene copper interconnections technique. The reflectance and transmittance spectra of the 3D copper photonic crystals were measured with the Fourier-transform infrared (FTIR) spectroscopy and simulated with the 3D FDTD method. Through both the experimental observation and the calculation verification, the characterization of the PBG is right at near infrared wavelengths. It is worth noted that some interesting behavior were observed in the spectra and transmitting ratio under different polarization incident conditions.