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結合矽奈米線閘極二極體之感測元件、製造方法及其檢測系統

dc.citation.patentcountryTWNzh_TW
dc.citation.patentnumber201100796zh_TW
dc.contributor.author許鉦宗en_US
dc.contributor.author陳振嘉en_US
dc.date.accessioned2014-12-16T06:12:32Z
dc.date.available2014-12-16T06:12:32Z
dc.date.issued2011-01-01en_US
dc.description.abstract本發明係揭露一種結合矽奈米線閘極二極體之感測元件、製造方法及其檢測系統。此感測元件包含一矽奈米線閘極二極體、一頓化層以及一微流道。頓化層包覆此矽奈米線蕭特基二極體且具有一經修飾之表面,微流道與頓化層接合。當一待測樣品透過該微流道接觸此經修飾之表面時,矽奈米線閘極二極體係相對應地產生一電性訊號,如電流值、電阻值或電導值變化,藉此此電性訊號之變化以檢測待測樣品之存在。zh_TW
dc.identifier.govdocG01N033/50zh_TW
dc.identifier.urihttps://ir.lib.nycu.edu.tw/handle/11536/103661
dc.language.isozh_TWen_US
dc.title結合矽奈米線閘極二極體之感測元件、製造方法及其檢測系統zh_TW
dc.typePatentsen_US

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