集束型半導體製程設備模擬器之軟體設計製作
| dc.contributor.author | 李安謙 | en_US |
| dc.contributor.author | LEE AN-CHEN | en_US |
| dc.contributor.department | 交通大學機械工程系 | zh_TW |
| dc.date.accessioned | 2014-12-13T10:35:19Z | |
| dc.date.available | 2014-12-13T10:35:19Z | |
| dc.date.issued | 2002 | en_US |
| dc.description.sponsorship | 行政院國家科學委員會 | zh_TW |
| dc.identifier.govdoc | NSC91-AT-7009-002 | zh_TW |
| dc.identifier.uri | https://www.grb.gov.tw/search/planDetail?id=790595&docId=151838 | en_US |
| dc.identifier.uri | https://ir.lib.nycu.edu.tw/handle/11536/93336 | |
| dc.language.iso | zh_TW | en_US |
| dc.title | 集束型半導體製程設備模擬器之軟體設計製作 | zh_TW |
| dc.title | Hardware-in-the-Loop-Based Verification of Controller Software for Cluster Tool in Semiconductor Manufacture | en_US |
| dc.type | Plan | en_US |