半導體工業的廢氣及微粒之聯合去除系統
| dc.contributor.author | 蔡春進 | en_US |
| dc.contributor.author | Chuen-Jinn Tsai | en_US |
| dc.contributor.department | 交通大學環境工程研究所 | zh_TW |
| dc.date.accessioned | 2014-12-13T10:34:25Z | |
| dc.date.available | 2014-12-13T10:34:25Z | |
| dc.date.issued | 2002 | en_US |
| dc.description.sponsorship | 行政院國家科學委員會 | zh_TW |
| dc.identifier.govdoc | NSC91-2622-E009-006-CC3 | zh_TW |
| dc.identifier.uri | https://www.grb.gov.tw/search/planDetail?id=712818&docId=133715 | en_US |
| dc.identifier.uri | https://ir.lib.nycu.edu.tw/handle/11536/92721 | |
| dc.language.iso | zh_TW | en_US |
| dc.title | 半導體工業的廢氣及微粒之聯合去除系統 | zh_TW |
| dc.title | A Combined Waste Gas-Particle Removal System for Semiconductor Industry | en_US |
| dc.type | Plan | en_US |
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