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使用有機金屬先驅物作銅銀金的化學蒸鍍

dc.contributor.author吉凱明en_US
dc.contributor.authorCHI KAI-MINGen_US
dc.contributor.department國立中正大學化學研究所zh_TW
dc.date.accessioned2014-12-13T10:40:14Z
dc.date.available2014-12-13T10:40:14Z
dc.date.issued1994en_US
dc.description.sponsorship行政院國家科學委員會zh_TW
dc.identifier.govdocNSC83-0208-M194-003zh_TW
dc.identifier.urihttps://www.grb.gov.tw/search/planDetail?id=99693&docId=15386en_US
dc.identifier.urihttps://ir.lib.nycu.edu.tw/handle/11536/97313
dc.language.isozh_TWen_US
dc.title使用有機金屬先驅物作銅銀金的化學蒸鍍zh_TW
dc.titleChemical Vapor Deposition of Cu, Ag and Au Form Organometallic Precursorsen_US
dc.typePlanen_US

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