Assembly of Micro Mirrors on SOI Wafers Using SU-8 Mechanisms and One-Push Operation
| dc.citation.epage | 111 | en_US |
| dc.citation.spage | 110 | en_US |
| dc.contributor.author | Chiu, Yi | en_US |
| dc.contributor.author | Huang, Wei-Zhi | en_US |
| dc.contributor.author | Wu, Jhong-Wei | en_US |
| dc.contributor.author | Chiou, Jin-Chem | en_US |
| dc.contributor.author | Shieh, Han-Ping D. | en_US |
| dc.contributor.department | 電控工程研究所 | zh_TW |
| dc.contributor.department | Institute of Electrical and Control Engineering | en_US |
| dc.date.accessioned | 2014-12-08T15:04:26Z | |
| dc.date.available | 2014-12-08T15:04:26Z | |
| dc.date.issued | 2008 | en_US |
| dc.description.abstract | Micro mirrors are assembled on silicon-on-insulator wafers using one-push operation. The proposed technique can reduce the overall complexity of micro system assembly by using automated equipments. Novel SU-8 mechanisms are also demonstrated. | en_US |
| dc.identifier.isbn | 978-1-4244-1917-3 | en_US |
| dc.identifier.journal | 2008 IEEE/LEOS INTERNATIONAL CONFERENCE ON OPTICAL MEMS AND NANOPHOTONICS | en_US |
| dc.identifier.uri | https://ir.lib.nycu.edu.tw/handle/11536/2941 | |
| dc.identifier.wosnumber | WOS:000264556700056 | |
| dc.language.iso | en_US | en_US |
| dc.title | Assembly of Micro Mirrors on SOI Wafers Using SU-8 Mechanisms and One-Push Operation | en_US |
| dc.type | Proceedings Paper | en_US |
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