晶圓製造廠爐管區控檔片之單迴圈網路模式

dc.contributor.author	彭文理	en_US
dc.contributor.author	WEN LEAPEARN	en_US
dc.contributor.department	國立交通大學工業工程與管理學系	zh_TW
dc.date.accessioned	2014-12-13T10:38:27Z
dc.date.available	2014-12-13T10:38:27Z
dc.date.issued	2001	en_US
dc.description.sponsorship	行政院國家科學委員會	zh_TW
dc.identifier.govdoc	NSC90-2218-E009-015	zh_TW
dc.identifier.uri	https://www.grb.gov.tw/search/planDetail?id=674269&docId=128520	en_US
dc.identifier.uri	https://ir.lib.nycu.edu.tw/handle/11536/95399
dc.language.iso	zh_TW	en_US
dc.subject	晶圓製造	zh_TW
dc.subject	爐管	zh_TW
dc.subject	單圈網路	zh_TW
dc.subject	半導體業	zh_TW
dc.subject	Wafer fabrication	en_US
dc.subject	Furnace tube	en_US
dc.subject	Single loop network	en_US
dc.subject	Semiconductor industry	en_US
dc.title	晶圓製造廠爐管區控檔片之單迴圈網路模式	zh_TW
dc.title	A Single Loop Network Model for Dummy/Control Wafers in the Furnace Area Wafer Fabrication	en_US
dc.type	Plan	en_US

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