Twin-GD: A new twin gated-diode measurement for the interface characterization of ultra-thin gate oxide MOSFET's with EOT down to 1nm

Abstract

In this paper, a new twin gated-diode (T-GD) method has been greatly improved for the oxide interface characterization of MOS devices with gate oxide as thin as 1nm (EOT). With the scaling of gate oxide thickness into 1mn regime, reported GD measurement can not give correct measurement due to gate tunneling leakage current. Here, we provide a simple method to remove this limitation. This method has been demonstrated successfully for the ultra-thin (EOT = 10.2 angstrom) gate oxide nMOSFET devices. Application of the method to the PBTI effects of high-k gate dielectric devices has been demonstrated. It was found that high-K device has worse gate oxide quality, but its interface damage is less than that of control oxide.