Design and Fabrication of a Near-field Scanning Optical Microscope Probe by CMOS-MEMS
| dc.citation.epage | 169 | en_US |
| dc.citation.spage | 168 | en_US |
| dc.contributor.author | Liou, C. H. | en_US |
| dc.contributor.author | Chiu, Y. | en_US |
| dc.contributor.author | Shieh, H. P. D. | en_US |
| dc.contributor.author | Chiou, J. C. | en_US |
| dc.contributor.department | 電機資訊學士班 | zh_TW |
| dc.contributor.department | Undergraduate Honors Program of Electrical Engineering and Computer Science | en_US |
| dc.date.accessioned | 2014-12-08T15:28:05Z | |
| dc.date.available | 2014-12-08T15:28:05Z | |
| dc.date.issued | 2012 | en_US |
| dc.description.abstract | A near-field scanning optical microscope (NSOM) probe based on CMOS-MEMS technology is proposed. The side pin-hole photodetector and the on-chip transimpedance amplifier were characterized. An optical profile measurement by using the fabricated device was performed. | en_US |
| dc.identifier.isbn | 978-1-4577-1513-6 | en_US |
| dc.identifier.journal | 2012 INTERNATIONAL CONFERENCE ON OPTICAL MEMS AND NANOPHOTONICS (OMN) | en_US |
| dc.identifier.uri | https://ir.lib.nycu.edu.tw/handle/11536/20346 | |
| dc.identifier.wosnumber | WOS:000309942400080 | |
| dc.language.iso | en_US | en_US |
| dc.subject | near-field scanning optical microscope | en_US |
| dc.subject | CMOS-MEMS | en_US |
| dc.subject | photodetector | en_US |
| dc.subject | side photodetector | en_US |
| dc.subject | transimpedance amplifier | en_US |
| dc.title | Design and Fabrication of a Near-field Scanning Optical Microscope Probe by CMOS-MEMS | en_US |
| dc.type | Proceedings Paper | en_US |
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