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Rapid displacement sensor based on fitting scan

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dc.citation.epage906en_US
dc.citation.spage901en_US
dc.citation.woscount0en_US
dc.contributor.authorYe, Zheng-Jieen_US
dc.contributor.authorHwang, Chi-Hungen_US
dc.contributor.authorCheng, Pi-Yingen_US
dc.contributor.authorChen, Chih-Yenen_US
dc.contributor.authorWeng, Chun-Jenen_US
dc.contributor.department機械工程學系zh_TW
dc.contributor.department材料科學與工程學系zh_TW
dc.contributor.departmentDepartment of Mechanical Engineeringen_US
dc.contributor.departmentDepartment of Materials Science and Engineeringen_US
dc.date.accessioned2017-04-21T06:49:51Z
dc.date.available2017-04-21T06:49:51Z
dc.date.issued2016en_US
dc.description.abstractA rapid displacement sensor with a varifocal lens based on a method of fitting scan is proposed for 3D surface profiling. The focal length of the varifocal lens can be adjusted by varying the driving current. By detecting the reflective power of the reflected laser, the displacement can be obtained. By integrating a LabVIEW program based on a Levenberg-Marquardt algorithm in this system, the measuring speed can be substantially improved. Finally, the 3D surface profile of a step-height sample was successfully scanned by this displacement sensor.en_US
dc.identifier.isbn978-1-4673-9220-4en_US
dc.identifier.journal2016 IEEE INTERNATIONAL INSTRUMENTATION AND MEASUREMENT TECHNOLOGY CONFERENCE PROCEEDINGSen_US
dc.identifier.urihttps://ir.lib.nycu.edu.tw/handle/11536/136192
dc.identifier.wosnumberWOS:000382523600160en_US
dc.language.isoen_USen_US
dc.subjectconfocalen_US
dc.subjectfast scanningen_US
dc.subjectcurve fittingen_US
dc.titleRapid displacement sensor based on fitting scanen_US
dc.typeProceedings Paperen_US

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