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鎳陶瓷奈米複合材料之製作與特性的探討及其在高密度、高深寬比之穿透晶片導線與微機電系統製作上之應用

dc.contributor.author鄭裕庭en_US
dc.contributor.authorYU-TINGCHENGen_US
dc.contributor.department國立交通大學電子工程學系zh_TW
dc.date.accessioned2014-12-13T10:33:44Z
dc.date.available2014-12-13T10:33:44Z
dc.date.issued2003en_US
dc.description.sponsorship行政院國家科學委員會zh_TW
dc.identifier.govdocNSC92-2215-E009-043zh_TW
dc.identifier.urihttps://www.grb.gov.tw/search/planDetail?id=796408&docId=152698en_US
dc.identifier.urihttps://ir.lib.nycu.edu.tw/handle/11536/92240
dc.language.isozh_TWen_US
dc.title鎳陶瓷奈米複合材料之製作與特性的探討及其在高密度、高深寬比之穿透晶片導線與微機電系統製作上之應用zh_TW
dc.titleFabrication and Characterization of Nickel-Ceramic Nanocomposite Materials for High Desity, Aspect Ratio Through-Wafer Electrical Interconnects and MEMS Applicationsen_US
dc.typePlanen_US

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