METHOD FOR REMOVING GERMANIUM SUBOXIDE
| dc.citation.patentcountry | USA | zh_TW |
| dc.citation.patentnumber | 20130171830 | zh_TW |
| dc.contributor.author | Liu Po-Tsun | en_US |
| dc.contributor.author | Huang Chen-Shuo | en_US |
| dc.date.accessioned | 2014-12-16T06:14:57Z | |
| dc.date.available | 2014-12-16T06:14:57Z | |
| dc.date.issued | 2013-07-04 | en_US |
| dc.description.abstract | A method for removing germanium suboxide between a germanium (Ge) substrate and a dielectric layer made of metal oxide includes causing a supercritical fluid composition that includes a supercritical carbon dioxide fluid and an oxidant to diffuse into the germanium suboxide such that metal residues in the dielectric layer, the germanium suboxide and the oxidant are subjected to a redox reaction so as to reduce the germanium suboxide into germanium. | zh_TW |
| dc.identifier.govdoc | H01L021/306 | zh_TW |
| dc.identifier.uri | https://ir.lib.nycu.edu.tw/handle/11536/105023 | |
| dc.language.iso | zh_TW | en_US |
| dc.title | METHOD FOR REMOVING GERMANIUM SUBOXIDE | zh_TW |
| dc.type | Patents | en_US |