A sensitive Pirani vacuum sensor and the electrothermal SPICE modelling
| dc.citation.epage | 277 | en_US |
| dc.citation.issue | 1-3 | en_US |
| dc.citation.spage | 273 | en_US |
| dc.citation.volume | 53 | en_US |
| dc.contributor.author | Chou, BCS | en_US |
| dc.contributor.author | Chen, YM | en_US |
| dc.contributor.author | OuYang, M | en_US |
| dc.contributor.author | Shie, JS | en_US |
| dc.contributor.department | 交大名義發表 | zh_TW |
| dc.contributor.department | 光電工程學系 | zh_TW |
| dc.contributor.department | National Chiao Tung University | en_US |
| dc.contributor.department | Department of Photonics | en_US |
| dc.date.accessioned | 2014-12-08T15:02:39Z | |
| dc.date.available | 2014-12-08T15:02:39Z | |
| dc.date.issued | 1996-05-01 | en_US |
| dc.description.abstract | A sensitive micro-Pirani vacuum sensor has been fabricated. With effective schemes of ambient-temperature compensation and stabilization, it is capable of measuring vacuum pressure linearly from 1 torr down to 10(-7) torr, a three orders-of-magnitude improvement in resolution over conventional gauges. A special electrothermal SPICE model, complementary to the conventional analog representation of thermal parameters, is also proposed. It allows a high-level sensor-circuit integrated simulation based on the most fundamental principle and thermal variables. Good agreement between the measured data obtained from a constant-temperature readout circuit and the simulation result is demonstrated. | en_US |
| dc.identifier.issn | 0924-4247 | en_US |
| dc.identifier.journal | SENSORS AND ACTUATORS A-PHYSICAL | en_US |
| dc.identifier.uri | https://ir.lib.nycu.edu.tw/handle/11536/1302 | |
| dc.identifier.wosnumber | WOS:A1996UV64900010 | |
| dc.language.iso | en_US | en_US |
| dc.subject | Pirani microsensors | en_US |
| dc.subject | electrothermal SPICE | en_US |
| dc.subject | constant-temperature circuits | en_US |
| dc.subject | temperature compensation | en_US |
| dc.title | A sensitive Pirani vacuum sensor and the electrothermal SPICE modelling | en_US |
| dc.type | Article; Proceedings Paper | en_US |