化學機械研磨在氧化鋁及氮化鎵上的應用研究

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892215E009039.pdf (1.16 MB)

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化學機械研磨 , 氮化鎵 , 單晶基板 , Chemical mechanical polish , GaN , Single crystal substrate

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https://www.grb.gov.tw/search/planDetail?id=542138&docId=99592
https://ir.lib.nycu.edu.tw/handle/11536/101637

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