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晶圓製造廠爐管區控檔片之多迴圈網路模式

dc.contributor.author彭文理en_US
dc.contributor.authorWEN LEAPEARNen_US
dc.contributor.department交通大學工業工程與管理系zh_TW
dc.date.accessioned2014-12-13T10:35:04Z
dc.date.available2014-12-13T10:35:04Z
dc.date.issued2002en_US
dc.description.sponsorship行政院國家科學委員會zh_TW
dc.identifier.govdocNSC91-2416-H009-014zh_TW
dc.identifier.urihttps://www.grb.gov.tw/search/planDetail?id=745664&docId=141333en_US
dc.identifier.urihttps://ir.lib.nycu.edu.tw/handle/11536/93195
dc.language.isozh_TWen_US
dc.title晶圓製造廠爐管區控檔片之多迴圈網路模式zh_TW
dc.titleA Multi-Loop Network Model for Dummy/Control Wafers in the Wafer Fabrication Furnace Areaen_US
dc.typePlanen_US

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