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尖端增強之微電漿元件

dc.citation.patentcountryTWNzh_TW
dc.citation.patentnumber200816254zh_TW
dc.contributor.author吳正宇en_US
dc.contributor.author金星吾en_US
dc.date.accessioned2014-12-16T06:13:04Z
dc.date.available2014-12-16T06:13:04Z
dc.date.issued2008-04-01en_US
dc.description.abstract一種尖端增强之微電漿元件,主要是利用微尖端結構具有很强的電場集中效應,乃於陰極板上設置有微尖端電極,可將電場局部集中於微尖端電極上,而易於在陰極板與陽極板間的放電空間中誘發出電漿現象,藉此達到降低電漿崩解電壓的效果。zh_TW
dc.identifier.govdocH01J001/02zh_TW
dc.identifier.urihttps://ir.lib.nycu.edu.tw/handle/11536/104002
dc.language.isozh_TWen_US
dc.title尖端增強之微電漿元件zh_TW
dc.typePatentsen_US

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