利用高效能熱製程改善低溫複晶矽薄膜電晶體之電性表現

dc.contributor.author	馮明憲	en_US
dc.contributor.department	交通大學材料科學與工程研究所	zh_TW
dc.date.accessioned	2014-12-13T10:32:13Z
dc.date.available	2014-12-13T10:32:13Z
dc.date.issued	2004	en_US
dc.description.sponsorship	行政院國家科學委員會	zh_TW
dc.identifier.govdoc	NSC93-2215-E009-038	zh_TW
dc.identifier.uri	https://www.grb.gov.tw/search/planDetail?id=1026710&docId=195186	en_US
dc.identifier.uri	https://ir.lib.nycu.edu.tw/handle/11536/91428
dc.language.iso	zh_TW	en_US
dc.title	利用高效能熱製程改善低溫複晶矽薄膜電晶體之電性表現	zh_TW
dc.title	The Performance of Poly-Si TFT was Improved by High Performance Thermal Process	en_US
dc.type	Plan	en_US

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