建立模擬非晶形矽薄膜沉積的化學動力學資料庫( III )
| dc.contributor.author | 林明璋 | en_US |
| dc.contributor.author | LIN MING CHANG | en_US |
| dc.contributor.department | 國立交通大學應用化學系（所） | zh_TW |
| dc.date.accessioned | 2014-12-13T10:31:05Z | |
| dc.date.available | 2014-12-13T10:31:05Z | |
| dc.date.issued | 2013 | en_US |
| dc.description.sponsorship | 行政院國家科學委員會 | zh_TW |
| dc.identifier.govdoc | NSC102-2113-M009-002 | zh_TW |
| dc.identifier.uri | https://www.grb.gov.tw/search/planDetail?id=3169947&docId=426488 | en_US |
| dc.identifier.uri | https://ir.lib.nycu.edu.tw/handle/11536/90705 | |
| dc.language.iso | zh_TW | en_US |
| dc.title | 建立模擬非晶形矽薄膜沉積的化學動力學資料庫( III ) | zh_TW |
| dc.title | Chemical Kinetics Database for Simulations of A-Si:H Thin Film Growth (III) | en_US |
| dc.type | Plan | en_US |
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