Photocapacitive Effect of Ferroelectric Hafnium-Zirconate Capacitor Structure
| dc.contributor.author | Liou, Guan-Lin | en_US |
| dc.contributor.author | Cheng, Chun-Hu | en_US |
| dc.contributor.author | Chiu, Yu-Chien | en_US |
| dc.contributor.department | 電子工程學系及電子研究所 | zh_TW |
| dc.contributor.department | Department of Electronics Engineering and Institute of Electronics | en_US |
| dc.date.accessioned | 2018-08-21T05:57:08Z | |
| dc.date.available | 2018-08-21T05:57:08Z | |
| dc.date.issued | 2017-01-01 | en_US |
| dc.description.abstract | In this work, we investigated the photocapacitive effect of the metal-ferroelectric-insulator-semiconductor capacitors under illumination. The photocapacitive effect is mainly caused by light photon excitation, contributed from the variation of depletion charge. We suggested that the ferroelectric domains are affected by defect dipole charges formed by the interface trapped charges to lead to the variation of depletion capacitance. | en_US |
| dc.identifier.journal | 2017 INTERNATIONAL CONFERENCE ON ELECTRON DEVICES AND SOLID-STATE CIRCUITS (EDSSC) | en_US |
| dc.identifier.uri | https://ir.lib.nycu.edu.tw/handle/11536/147105 | |
| dc.identifier.wosnumber | WOS:000426985900109 | en_US |
| dc.language.iso | en_US | en_US |
| dc.subject | Ferroelectric | en_US |
| dc.subject | Hafnium-Zirconate | en_US |
| dc.subject | Photocapacitive Effect | en_US |
| dc.title | Photocapacitive Effect of Ferroelectric Hafnium-Zirconate Capacitor Structure | en_US |
| dc.type | Proceedings Paper | en_US |
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