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低介電常數材料應用在超大型積體電路上之研究(II)
低介電常數材料應用在超大型積體電路上之研究(II)
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902215E009047.pdf
(1.5 MB)
902215E009047.pdf
(1.5 MB)
Date
2001
Authors
施敏
SZE SIMON MIN
Journal Title
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Volume Title
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Abstract
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Keywords
低介電常數
,
極大型積體電路
,
介電材料
,
Low dielectric constant
,
ULSI
,
Dielectric material
Citation
URI
https://www.grb.gov.tw/search/planDetail?id=665631&docId=126355
https://ir.lib.nycu.edu.tw/handle/11536/94055
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