Method for removing germanium suboxide
| dc.citation.patentcountry | USA | zh_TW |
| dc.citation.patentnumber | 08691636 | zh_TW |
| dc.contributor.author | Liu Po-Tsun | en_US |
| dc.contributor.author | Huang Chen-Shuo | en_US |
| dc.date.accessioned | 2014-12-16T06:13:52Z | |
| dc.date.available | 2014-12-16T06:13:52Z | |
| dc.date.issued | 2014-04-08 | en_US |
| dc.description.abstract | A method for removing germanium suboxide between a germanium (Ge) substrate and a dielectric layer made of metal oxide includes causing a supercritical fluid composition that includes a supercritical carbon dioxide fluid and an oxidant to diffuse into the germanium suboxide such that metal residues in the dielectric layer, the germanium suboxide and the oxidant are subjected to a redox reaction so as to reduce the germanium suboxide into germanium. | zh_TW |
| dc.identifier.govdoc | H01L021/335 | zh_TW |
| dc.identifier.govdoc | H01L021/8232 | zh_TW |
| dc.identifier.uri | https://ir.lib.nycu.edu.tw/handle/11536/104393 | |
| dc.language.iso | zh_TW | en_US |
| dc.title | Method for removing germanium suboxide | zh_TW |
| dc.type | Patents | en_US |