國立交通大學機構典藏：研究人員|半導體材料與製程設備組|張立

張立 Chang, Li

電子郵件／E-mail：lichang@cc.nctu.edu.tw

服務單位／Department：工學院／半導體材料與製程設備組

著作期間／Publish Period：1977-01-01 - 2014-10-03

著作統計／Statistics

Article（92）

Others（3）

Patents（9）

Plan（32）

Proceedings Paper（44）

Thesis（54）

Article

序號 No.	標題 Title	著作日期 Date
1	Heteroepitaxial growth of TiN film on MgO (100) by reactive magnetron sputtering	2014-10-03
2	Structural and nanoindentation studies of epitaxial titanium oxynitride (001) films grown on MgO(001) substrate	2014-07-25
3	Effect of In/Al ratios on structural and optical properties of InAlN films grown on Si(100) by RF-MOMBE	2014-05-01
4	Defects in nonpolar (13(4)over-bar0) ZnO epitaxial film grown on (114) LaAlO3 substrate	2014-03-01
5	Chemical vapor deposition of diamond on an adamantane-coated sapphire substrate	2014-01-01
6	Valley-dependent resonant inelastic transmission through a time-modulated region in graphene	2013-11-18
7	The role of the interface structure on the growth of nonpolar (10(1)over-bar0) and semipolar (11(2)over-bar(2)over-bar) ZnO on (112) LaAlO3 substrates	2013-10-15
8	Effect of Growth Temperature on Formation of Amorphous Nitride Interlayer between AlN and Si(111)	2013-08-01
9	Stability and etching of titanium oxynitride films in hydrogen microwave plasma	2013-07-01
10	Semipolar (11(2)over-bar(2)over-bar) ZnO thin films grown on LaAlO3-buffered LSAT (112) single crystals by pulsed laser deposition	2013-04-01
11	Defects in semipolar (11(2)over-bar(2)over-bar) ZnO grown on (112) LaAlO3/(La, Sr) (Al, Ta)O-3 substrate by pulsed laser deposition	2013-03-27
12	Interfacial structure of a-plane ZnO grown on r-plane sapphire by pulsed laser deposition	2013-03-01
13	Morphology evolution of a-plane ZnO films on r-plane sapphire with growth by pulsed laser deposition	2013-01-15
14	Structure and property of epitaxial titanium oxynitride grown on MgO(001) substrate by pulsed laser deposition	2013-01-15
15	Chemical vapor deposition of diamond on silicon substrates coated with adamantane in glycol chemical solutions	2013-01-01
16	Atomistic nucleation sites of Pt nanoparticles on N-doped carbon nanotubes	2013-01-01
17	Influence of V/III Flow Ratio on Growth of InN on GaN by PA-MOMBE	2013-01-01
18	Orthorhombic BiFeO3	2012-12-14
19	The cooling effect on structural, electrical, and optical properties of epitaxial a-plane ZnO:Al on r-plane sapphire grown by pulsed laser deposition	2012-10-08
20	Study of InN epitaxial films and nanorods grown on GaN template by RF-MOMBE	2012-08-21
21	Fabrication and structural property of diamond nano-platelet arrays on {111) textured diamond film	2012-05-01
22	Strain-driven phase boundaries in BiFeO(3) thin films studied by atomic force microscopy and x-ray diffraction	2012-01-17
23	How do InAs quantum dots relax when the InAs growth thickness exceeds the dislocation-induced critical thickness?	2012-01-01
24	Semipolar GaN Films on Prism Stripe Patterned a-Plane Sapphire Substrates	2012-01-01
25	Optical investigation of A-plane ZnO/ZnMgO multiple quantum wells grown by pulsed laser deposition	2011-12-01
26	Electron Emission Properties of Nitrogen-Induced Localized Defects in InAsN/GaAs Quantum Dots	2011-11-01
27	Enhanced Nucleation and Growth of Diamond Film on Si by CVD Using a Chemical Precursor	2011-08-18
28	Improving the photoluminescence properties of self-assembled InAs surface quantum dots by incorporation of antimony	2011-08-15
29	Nanoscale Structure and Mechanism for Enhanced Electromechanical Response of Highly Strained BiFeO(3) Thin Films	2011-07-26
30	Heteroepitaxial growth of InN on GaN intermediate layer by PA-MOMBE	2011-07-01
31	The influence of carbon addition on carbide characteristics and mechanical properties of CM-681LC superalloy using fine-grain process	2011-05-05
32	Effect of growth temperature on a-plane ZnO formation on r-plane sapphire	2011-05-01
33	Defects in m-plane ZnO epitaxial films grown on (112) LaAlO(3) substrate	2011-05-01
34	Growth of Semipolar InN(10(1)over-bar3) on LaAlO(3)(112) Substrate	2011-04-01
35	Epitaxial growth of titanium oxycarbide on MgO (001) substrates by pulsed laser deposition	2011-01-15
36	Electron delocalization of tensily strained GaAs quantum dots in GaSb matrix	2010-12-15
37	Optical characteristics of a-plane ZnO/Zn(0.8)Mg(0.2)O multiple quantum wells grown by pulsed laser deposition	2010-10-01
38	Bimodel onset strain relaxation in InAs quantum dots with an InGaAs capping layer	2010-08-30
39	Growth of 3C-SiC on Si(111) using the four-step non-cooling process	2010-08-02
40	Diamond plates on dome-like particles: preparation, characterization and field emission properties	2010-08-01
41	The effects of carbon content on the microstructure and elevated temperature tensile strength of a nickel-base superalloy	2010-06-25
42	Growth, microstructure, and field-emission properties of synthesized diamond film on adamantane-coated silicon substrate by microwave plasma chemical vapor deposition	2010-05-15
43	The synthesis of diamond films on adamantane-coated Si substrate at low temperature	2010-04-15
44	Etching of GaN by microwave plasma of hydrogen	2010-03-04
45	Chemical Precursor for the Synthesis of Diamond Films at Low Temperature	2010-01-01
46	Crystal Quality of 3C-SiC Influenced by the Diffusion Step in the Modified Four-Step Method	2010-01-01
47	Structural and optical properties of buried InAs/GaAs quantum dots on GaAsSb buffer layer	2009-09-21
48	Pulse Electrodeposition of Iridium Oxide on Silicon Nanotips for Field Emission study	2009-05-01
49	Epitaxy of m-plane ZnO on (112) LaAlO(3) substrate	2009-05-01
50	Strain relaxation in InAs self-assembled quantum dots induced by a high N incorporation	2008-11-15
51	Geometrical correlations of quantum dots in InAs/GaAs superlattice structure from electron tomography	2008-10-13
52	Growth of nonpolar (11(2)over-bar0) ZnO films on LaAlO(3) (001) substrates	2008-09-22
53	Effect of antimony incorporation on the density, shape, and luminescence of InAs quantum dots	2008-07-15
54	Growth of diamond nanoplatelets by CVD	2008-07-01
55	Atomic scale characterization of buried In(x)Ga(1-x)As quantum dots using pulsed laser atom probe tomography	2008-06-09
56	Investigations on highly stable thermal characteristics of a dilute In(0.2)Ga(0.8)AsSb/GaAs doped-channel field-effect transistor	2008-04-01
57	Growth and structural characterization of ZnO on Y2O3/YSZ by pulsed laser deposition	2008-03-15
58	Growth of a-plane ZnO thin films on LaAlO3(100) substrate by metal-organic chemical vapor deposition	2008-02-15
59	Effect of hot isostatic pressing on microstructure and mechanical properties of CM-681LC nickel-base superalloy using microcast	2008-01-01
60	Fabrication and field-emission characteristics of TiN nanorods with a concave top surface	2008-01-01
61	Relaxation-induced lattice misfits and their effects on the emission properties of InAs quantum dots	2007-09-05
62	Dislocation reduction in GaN grown on stripe patterned r-plane sapphire substrates	2007-07-09
63	Mechanism of microstructure evolution for the Cu/Ta/GaAs structure after thermal annealing	2007-04-01
64	Effect of gate sinking on the device performance, of the InGaP/AlGaAs/InGaAs enhancement-mode PHEMT	2007-02-01
65	A novel dilute antimony channel In0.2Ga0.8AsSb/GaAs HEMT	2007-02-01
66	Amorphous carbon coated silicon nanotips fabricated by MPCVD using anodic aluminum oxide as the template	2007-01-01
67	Chemical vapour deposition of oriented diamond nanocrystallites by a bias-enhanced nucleation method	2006-11-28
68	Magnetotransport properties, electronic structure, and microstructure of La0.7Sn0.3MnO3 thin films	2006-10-01
69	Strain relaxation and induced defects in InAsSb self-assembled quantum dots	2006-06-05
70	Crack-free GaN/AlN distributed Bragg reflectors incorporated with GaN/AlN superlattices grown by metalorganic chemical vapor deposition	2006-02-06
71	Effect of trimethylsilylation on the film stress of mesoporous silica ultralow-k film stacks	2006-01-01
72	Thermal stability of trimethylsilylated mesoporous silica thin films as the ultralow-k dielectric for copper interconnects	2005-09-01
73	Microstructural investigation of hexagonal-shaped diamond nanoplatelets grown by microwave plasma chemical vapor deposition	2005-07-15
74	Ultrafine platinum nanoparticles uniformly dispersed on arrayed CNx nanotubes with high electrochemical activity	2005-07-12
75	Growth of zinc oxide thin films on Y2O3/Si substrates by chemical vapor deposition	2005-02-15
76	Diamond nucleation on Ni3Al substrate using bias enhanced nucleation method	2005-02-01
77	Alkylation of nanoporous silica thin films by high density plasma chemical vapor deposition of a-SIC : H	2004-05-01
78	Pattern-dependent copper microcorrosion from CMP	2004-01-01
79	Bandgap mapping for III-V quantum well by electron spectroscopy imaging	2004-01-01
80	Study of titanium tungsten nitride and tungsten nitride Schottky contacts on n-GaN	2003-07-01
81	Microstructure and mechanical properties of surfactant templated nanoporous silica thin films: Effect of methylsilylation	2003-06-01
82	The performance of GaAs power MESFET's using backside copper metallization	2002-12-01
83	High power Al0.3Ga0.7As/In0.2Ga0.8As enhancement-mode PHEMT for low-voltage wireless communication systems	2002-08-29
84	Low-voltage-operation high-power-density AlGaAs/InGaAs enhancement-mode pseudomorphic high-electron-mobility transistor for personal handy-phone handset application	2002-01-15
85	Highly oriented diamond growth on positively biased Si substrates	2001-12-01
86	Observations of Al segregation around dislocations in AlGaN	2001-08-13
87	The effect of oxygen on the interfacial reactions of Cu/TaNx/Si multilayers	2001-08-01
88	Backside copper metallization of GaAs MESFETs using TaN as the diffusion barrier	2001-06-01
89	The effect of oxygen in the annealing ambient on interfacial reactions of Cu/Ta/Si multilayers	2001-06-01
90	Oxidation of Ta diffusion barrier layer for Cu metallization in thermal annealing	2001-06-01
91	Thermal stability of Cu/Ta/GaAs multilayers	2000-11-20
92	Microstructural investigation of oxidized Ni/Au ohmic contact to p-type GaN	1999-10-01

Others

序號 No.	標題 Title	著作日期 Date
1	Chemical polishing method of GaAs specimens for transmission electron microscopy	2010-01-01
2	Valence state map of iron oxide thin film obtained from electron spectroscopy imaging series	2007-01-01
3	SHIFTING OF PEAK GENERATION RATE IN DOUBLE-DRIFT SILICON IMPATT DIODES	1977-01-01

Patents

序號 No.	標題 Title	著作日期 Date
1	鑽石薄膜成長方法	2014-08-01
2	鑽石磊晶成長方式	2014-06-01
3	一種形成鑽石膜的成核方法	2014-05-01
4	以單晶氧化物作為基板成長纖鋅礦結構半導體非極性ｍ面磊晶層之方法	2014-02-01
5	纖鋅礦結構材料之非極性晶面	2013-09-16
6	以水溶液製備金屬氧化物薄膜之方法	2013-02-11
7	以單晶氧化物作為基板成長纖鋅礦結構半導體非極性ｍ面磊晶層之方法	2011-04-01
8	Method for growing non-polar m-plane epitaxial layer of wurtzite semiconductors on single crystal oxide substrates	2011-03-17
9	以水溶液製備金屬氧化物薄膜之方法	2010-06-01

Plan

序號 No.	標題 Title	著作日期 Date
1	化學氣相沉積鑽石之新技術研究	2014
2	霧化式化學氣相沉積氧化鋅磊晶薄膜	2014
3	霧化式化學氣相沉積氧化鋅磊晶薄膜	2013
4	化學氣相沉積鑽石之新技術研究	2013
5	霧化式化學氣相沉積氧化鋅磊晶薄膜	2012
6	化學氣相沉積鑽石之新技術研究	2012
7	基板工程應用於氧化鋅與鑽石異質磊晶成長之研究	2011
8	富銦之氮化鋁銦薄膜成長與性質	2010
9	基板工程應用於氧化鋅與鑽石異質磊晶成長之研究	2010
10	基板工程應用於氧化鋅與鑽石異質磊晶成長之研究	2009
11	單光子源之奈米鑽石製備及特性研究	2008
12	氧化鋅摻雜改質與奈米結構之製程與光電特性研究---子計畫一：氧化鋅光電半導體能隙調整及磊晶成長研究(III)	2007
13	單光子源之奈米鑽石製備及特性研究	2007
14	微波電漿化學氣相沉積光學鑽石晶片製造技術	2007
15	氧化鋅摻雜改質與奈米結構之製程與光電特性研究---氧化鋅光電半導體能隙調整及磊晶成長研究(II)	2006
16	單光子源之奈米鑽石製備及特性研究	2006
17	氧化鋅摻雜改質與奈米結構之製程與光電特性研究-氧化鋅光電半導體能隙調整及磊晶成長研究(I)	2005
18	基材影響鑽石成長之機制研究(III)	2005
19	基材影響鑽石成長之機制研究(II)	2004
20	光資訊關鍵性材料製程與性質研究---子計畫四:磊晶氧化鋅之製程及特性研究(II)	2004
21	基材影響鑽石成長之機制研究(I)	2003
22	光資訊關鍵性材料製程與性質研究---子計畫IV：磊晶氧化鋅之製程及特性研究(II)	2003
23	光資訊關鍵性材料製程與性質研究---子計畫IV：磊晶氧化鋅之製程及特性研究(I)	2002
24	探討影響異質磊晶鑽石成長之因素(III)	2002
25	探討影響異質磊晶鑽石成長之因素(II)	2001
26	銅導線及其障礙層之材質研究	2000
27	銅導線及其障礙層之材質研究(II)	2000
28	偏壓法於非導體基材成長磊晶鑽石之研究(II)	2000
29	探討影響異質磊晶鑽石成長之因素(I)	2000
30	偏壓法於非導體基材成長磊晶鑽石之研究	1999
31	超大型積體電路中連接導線之銅材及障礙層微結構及特性研究	1999
32	磊晶鑽石膜成核之研究	1998

Proceedings Paper

序號 No.	標題 Title	著作日期 Date
1	Photoluminescence Study of Interdot Carrier Transfer on Strain-relaxed InAs Quantum Dots	2011-01-01
2	The influence of inserted ZnO underlayer on the growth behavior of a-plane GaN on (001) LaAlO(3)	2010-04-01
3	Structural property of m-plane ZnO epitaxial film grown on LaAlO(3) (112) substrate	2010-04-01
4	Microstructure of a-plane ZnO grown on LaAlO(3) (001)	2010-03-31
5	Substrate engineering of LaAlO(3) for non-polar ZnO growth	2010-03-31
6	Growth of diamond nanoplatelets on nanocrystalline diamond substrates	2009-02-01
7	Growth and characterization of diamond films on TiN/Si(100) by microwave plasma chemical vapor deposition	2009-02-01
8	Non-polar a-plane GaN grown on LaAlO3 (001) substrate by pulsed laser deposition	2008-04-01
9	Investigation on microstructure in GaN epitaxial growth on the stripe-patterned r-plane sapphire substrates	2008-04-01
10	Growth of ZnMgO/ZnO films on r-plane sapphires by pulsed laser deposition	2008-04-01
11	Bias-enhanced nucleation of oriented diamonds on cone-like Si	2008-04-01
12	Growth of epitaxial ZnO thin film on yttria-stabilized zirconia single-crystal substrate	2007-01-01
13	Atomic layer deposition of epitaxial ZnO on GaN and YSZ	2007-01-01
14	GaN/AlGaN active regions for terahertz quantum cascade lasers grown by low-pressure metal organic vapor deposition	2007-01-01
15	Growth and characterization of chemical-vapor-deposited zinc oxide nanorods	2006-03-01
16	Chemical vapor deposition of uniform and high-quality diamond films by bias-enhanced nucleation method	2006-03-01
17	Novel slurry solution for dishing elimination in copper process beyond 0.1-mu m technology	2006-03-01
18	Effects of plasma treatment in the tungsten process for chemical vapor deposition titanium nitride barrier film beyond nanometer technology	2006-03-01
19	Investigation of overpotential and seed thickness on damascene copper electroplating	2006-02-24
20	The orientation effect of silicon grains on diamond deposition	2005-11-01
21	Microwave plasma chemical vapor deposition of cone-like structure of diamond/SiC/Si on Si (100)	2005-11-01
22	Highly oriented diamond growth on SixGe1-x (100) thin films	2004-11-01
23	Synthesis of diamond hexagonal nanoplatelets by microwave plasma chemical vapor deposition	2004-11-01
24	Diamond deposition on Au/amorphotis Si thin films	2004-04-01
25	Characterization of diamond nanoplatelets	2004-04-01
26	Evaluation of advanced chemical mechanical planarization techniques for copper damascene interconnect	2004-01-30
27	Microstructural evolution of Cu/Ta/GaAs multilayers with thermal annealing	2004-01-01
28	Chemical vapor deposition of zinc oxide thin films on Y2O3/Si substrates	2004-01-01
29	Chemical vapor deposition of epitaxial zinc oxide thin films on gallium nitride/sapphire substrates	2004-01-01
30	Diamond deposition on Si (111) and carbon face 6H-SiC (0001) substrates by positively biased pretreatment	2002-03-01
31	Growth of diamond films with bias during microwave plasma chemical vapor deposition	2002-03-01
32	Observations of segregation of Al in AlGaN alloys	2001-11-23
33	Diamond growth onCoSi(2)/Si by bias-enhanced microwave plasma chemical vapor deposition method	2001-11-01
34	Diamond nucleation on Cu by using MPCVD with a biasing pretreatment	2001-11-01
35	Novel strategies of FSG-CMP for within-wafer uniformity improvement and wafer edge yield enhancement beyond 0.18 micro technologies	2001-01-01
36	Four-dimensional dielectric property image obtained from electron spectroscopic imaging series	2001-01-01
37	Extension of HRTEM resolution by semi-blind deconvolution method and Gerchberg-Saxton algorithm: application to grain boundary and interface	2001-01-01
38	Deposition of heteroepitaxial diamond on 6H-SiC single crystal by bias-enhanced microwave plasma chemical vapor deposition	2000-04-01
39	Backside copper metallization of GaAs MESFET's using Ta and TaN as diffusion barrier	2000-01-01
40	The effect of heat treatment on Ni/Au ohmic contacts to p-type GaN	1999-11-16
41	Improvement of resolution by maximum entropy linear image restoration for NiSi2/Si interface	1999-01-01
42	HRTEM and EFTEM studies of the evolution of Cu/Ta/SiO2/Si interfaces in ULSI devices	1999-01-01
43	Microstructural investigation of oxidized Ni/Au ohmic contact to p-type GaN	1999-01-01
44	High resolution and energy filtering TEM study of interfacial structure and reaction in advanced materials processing	1998-04-10

Thesis

序號 No.	標題 Title	著作日期 Date
1	以化學浴法在圖案化基板上側向成長非極性氧化鋅	2014
2	氮化矽層抑制氮化鎵成長於(111)矽基板之回熔蝕刻現象研究	2014
3	霧化化學氣相沉積氧化鋅薄膜於藍寶石單晶	2014
4	以水熱法在異質基板上成長氧化鋅之研究	2013
5	鋁酸鑭上之半極性氧化鋅磊晶薄膜-成長與結構分析	2013
6	成長於氧化鎂基板上之氮氧化鈦與碳氧化鈦磊晶薄膜結構與特性研究	2013
7	鑲埋矽基量子點之鑽石(111)同質磊晶成長	2013
8	矽磊晶製程表面微粒污染減量之研究	2013
9	脈衝雷射沉積非極性A面氧化鋅於R面藍寶石基板之磊晶研究 - 表面形貌、應變，以及結晶性之演變	2012
10	領導者正向心情及服務績效的跨層次分析：透過團體氛圍及正向心理資本的中介	2012
11	有機金屬分子束磊晶成長極性/半極性氮化銦磊晶薄膜之研究	2012
12	於氮化鋁/矽基板上沉積鑽石之研究	2011
13	熱均壓及碳含量對微細鑄造CM-681LC超合金顯微組織及機械性能之研究	2010
14	於鋁酸鑭單晶基板成長非極性氧化鋅薄膜之研究	2010
15	風險評估技術應用於變更管理改善之研究—以某公司加氣站為例	2010
16	成長於鋁酸鑭基板上之非極性氧化鋅薄膜顯微結構分析	2010
17	在金剛烷披覆之矽基材上探討鑽石的成核、成長與結構特性之研究	2010
18	動態隨機存取記憶體(DRAM)電容清洗技術之研究	2010
19	奈米金粒鑲埋於鑽石(111)面之同質磊晶成長	2010
20	影響網路團購行為因素之研究	2010
21	臭氧前處理及雷射退火對多晶矽特性之研究	2009
22	在具有氮化鈦緩衝層之(001)矽晶片上成長鑽石之研究	2009
23	穿透式電子顯微鏡應用於超晶格結構中內層砷化銦/砷化鎵量子點之研究	2009
24	規則性奈米平板鑽石沉積在高方向性(111)鑽石薄膜基板之研究	2008
25	脈衝雷射沉積法成長非極性摻雜鋁之氧化鋅磊晶薄膜於R面(1-102)藍寶石基板	2008
26	陽極氧化鋁模版法製作奈米結構材料及其電子場發射特性研究	2008
27	水溶液法成長氧化鋅薄膜及其薄膜電晶體製作	2007
28	偏壓法生長方向性鑽石薄膜之研究	2007
29	使用緩衝層成長磊晶氧化鋅於單晶基板上之研究	2007
30	GaAsSb緩衝層對於InAs/GaAs系統中量子點結構與性質之效應	2006
31	偏壓輔助化學氣相沉積均勻鑽石-成核和成長之研究	2006
32	金屬有機化學氣相沉積磊晶氧化鋅薄膜於氧化物單晶基板之研究	2006
33	射頻濺鍍氧化鋅薄膜於鍺基板之研究	2006
34	使用I-line stepper 開發 Low cost 及可大量生產之0.25 um gate pHEMT	2006
35	奈米平板鑽石沉積在(111)面向鑽石薄膜之研究	2006
36	The effect of cubic SiC on formation of oriented diamonds on Si(100) substrates	2006
37	二維奈米平板鑽石之合成及其微結構分析之研究	2005
38	介孔洞二氧化矽超低介電薄膜在積體電路技術之應用	2005
39	銅製程在奈米半導體積體電路製程整合研究	2005
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張立 Chang, Li

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