National Chiao Tung University Institutional Repository：Browsing IR@NCTU

Browsing by Author Tseng, WT

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Issue Date	Title	Author(s)
1-May-1999	Process optimization and integration for silicon oxide intermetal dielectric planarized by chemical mechanical polish	Lin, CF; Tseng, WT; Feng, MS; 材料科學與工程學系; Department of Materials Science and Engineering
1-Dec-1998	Process optimization of plasma-enhanced chemical vapor deposited passivation thin films for improving nonvolatile memory IC performance	Lin, CF; Tseng, WT; Feng, MS; 材料科學與工程學系; Department of Materials Science and Engineering
1-Dec-1998	Process optimization of plasma-enhanced chemical vapor deposited passivation thin films for improving nonvolatile memory IC performance	Lin, CF; Tseng, WT; Feng, MS; 材料科學與工程學系; Department of Materials Science and Engineering
1-Feb-1997	Re-examination of pressure and speed dependences of removal rate during chemical-mechanical polishing processes	Tseng, WT; Wang, YL; 電子工程學系及電子研究所; Department of Electronics Engineering and Institute of Electronics
1998	ULSI multi-layer thin film passivation processes for improving cache memory performance	Lin, CF; Tseng, WT; Feng, MS; Chang, YF; Hsu, JJ; 材料科學與工程學系; Department of Materials Science and Engineering
22-Jun-1999	A ULSI shallow trench isolation process through the integration of multilayered dielectric process and chemical-mechanical planarization	Lin, CF; Tseng, WT; Feng, MS; Wang, YL; 材料科學與工程學系; Department of Materials Science and Engineering

Showing results 23 to 28 of 28 < previous