Browsing by Author Ding, PJ
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Issue Date | Title | Author(s) |
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1-Jun-2001 | Oxidation of Ta diffusion barrier layer for Cu metallization in thermal annealing | Yin, KM; Chang, L; Chen, FR; Kai, JJ; Chiang, CC; Chuang, G; Ding, PJ; Chin, B; Zhang, H; Chen, FS; 材料科學與工程學系; Department of Materials Science and Engineering |