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Issue DateTitleAuthor(s)
2001二矽烷複晶矽薄膜及四氟化碳電漿預處理技術在製備薄氧化層之研究李介文; Jam Wem Lee; 李崇仁; 雷添福; Chung_Len Lee; Tan Fu Lei; 電子研究所
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