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Issue DateTitleAuthor(s)
2005ULSI嵌入式銅導線無砥粒化學機械平坦化技術方政煜; Jeng-Yu Fang; 馮明憲; 蔡明蒔; Ming-Shiann Feng; Ming-Shih Tsai; 材料科學與工程學系
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