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Browsing by Author KOW-MING CHANG

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1996利用矽烷,氧氣及四氟化碳在電子迴旋共振系統中沉積之低介電常數氟氧化矽的研究王士瑋; WANG, SHIH-WEI; 張國明; KOW-MING CHANG; 電子研究所
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