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Issue DateTitleAuthor(s)
1990CCl F 及CHF 氣體在活性離子蝕刻系統中對Si及SiO 表面之蝕刻及成膜行為陳俊麟; CHEN,JUN-LIN; 龍文安; LONG,WEN-AN; 應用化學系碩博士班
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