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Issue DateTitleAuthor(s)
1995使用大氣壓式與半大氣壓式化學氣相沉積法成長二氧化矽應用於多層複晶製程上填隙能力之研究魏正泉; Wei, Zin-Chein; 鄭晃忠; Cheng　Huang-Chung; 電子研究所
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