Browsing by Subject ozone water
Showing results 1 to 2 of 2
| Issue Date | Title | Author(s) |
|---|---|---|
| 30-Jun-2003 | Novel post CMP cleaning using buffered HF solution and ozone water | Yeh, CF; Hsiao, CW; Lee, WS; 電子工程學系及電子研究所; Department of Electronics Engineering and Institute of Electronics |
| 2004 | 沉基氧化鋁絕緣層之前的不同表面處理之研究 | 陳昶維; Chang-Wei Chen; 葉清發; 羅正忠; Ching-Fa Yeh; Jen-Chung Lou; 電子研究所 |