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Browsing by Author 陳世錦

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Issue DateTitleAuthor(s)
1999微波電子迴旋共振電漿物理氣相沉積法於矽晶片上沉積Si-C-N薄膜及其特性分析陳世錦; Chen Shih-Jing; 郭正次; Cheng-Tzu Kuo; 材料科學與工程學系
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