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1986熱氮化薄二氧化矽膜在超大型互補式金氧半場效電晶體之閘及新場絕緣上的應用─新技術及其評估蔡泓祥; CAI, HONG-XIANG; 吳慶源; WU, GING-YUAN; 電子研究所
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