Browsing by Author Chao, T
Showing results 1 to 1 of 1
| Issue Date | Title | Author(s) |
|---|---|---|
| 30-May-2005 | Characterization of CF4-plasma fluorinated HfO2 gate dielectrics with TaN metal gate | Lai, CS; Wu, WC; Wang, JC; Chao, T; 物理研究所; Institute of Physics |
| Issue Date | Title | Author(s) |
|---|---|---|
| 30-May-2005 | Characterization of CF4-plasma fluorinated HfO2 gate dielectrics with TaN metal gate | Lai, CS; Wu, WC; Wang, JC; Chao, T; 物理研究所; Institute of Physics |