Browsing by Author Chi, CY
Showing results 1 to 1 of 1
| Issue Date | Title | Author(s) |
|---|---|---|
| 1-Sep-2004 | Dynamic tuning of chemical-mechanical planarization operation via sliding-mode theory | Lin, CS; Chi, CY; 機械工程學系; Department of Mechanical Engineering |
| Issue Date | Title | Author(s) |
|---|---|---|
| 1-Sep-2004 | Dynamic tuning of chemical-mechanical planarization operation via sliding-mode theory | Lin, CS; Chi, CY; 機械工程學系; Department of Mechanical Engineering |