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1987高密度金氧半電晶體超大型積體電路動態存取記憶元件之高可靠性二氧化矽/ 氮化矽/ 二氧化矽複層膜的新製程技術-製程及分析溫□珊; WEN, GUI-SHAN; 吳慶源; WU, GING-YUAN; 電子研究所
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