Browsing by Author Yu, Zhi-Cheng
Showing results 1 to 1 of 1
| Issue Date | Title | Author(s) |
|---|---|---|
| 1997 | Fabrication、Analysis and Research of Three-layer Polysilicon Thermal Microactuators and Micro Sliding System | 余志誠; Yu, Zhi-Cheng; 邱俊誠; Qiu, Zun-Cheng; 電控工程研究所 |