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收集所有交通大學研究人員與學生個人或團體所發表之各項學術著作,涵蓋期刊論文、教師專書、學位論文等項。;;Collections of Publications of NCTU Researchers and Students Like Journal Papers and Thesis.
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Item type:Item, AN EFFICIENT PRECLEAN OF ALUMINIZED SILICON SUBSTRATE FOR CHEMICAL-VAPOR-DEPOSITION OF SUBMICRON TUNGSTEN PLUGS(1995-10-01) ;YEH, WK ;TSAI, MH ;CHEN, SH ;CHEN, MCWANG, PJPreclean of aluminum trench and via patterned substrates is vital for successful selective chemical vapor deposition of tungsten (CVD-W). A convenient preclean method uses in situ. BCl3 plasma etching to remove the native metal oxide prior to conducting the CVD-W. During the plasma etching, however, the outsputtered aluminum oxide and aluminum can be redeposited on the sidewall of the trench and via hole and on the surface of the dielectric layer, where W nucleation is induced, resulting in creep-up and selectivity loss during tungsten deposition. By using a solution of hydroxylamine sulfate to pretreat the aluminum trench and via hole patterned substrates, we successfully avoid the creep-up and selectivity loss of W deposition.Item type:Item, THE MAGNETIC-FIELD-INDUCED BIREFRINGENCE OF THE MIXTURES OF THE CHIRAL MOLECULES AND THE FERRONEMATIC LIQUID-CRYSTALS(1987-01-01) ;CHEN, SH ;CHIANG, SH ;光電工程研究所Institute of EO EnginerringItem type:Item, OPTIMIZATION-BASED CONTROL-SYSTEM DESIGN(1990) ;LIN, CA ;CHEN, SH ;電控工程研究所Institute of Electrical and Control EngineeringItem type:Item, A SEGMENT-BASED SPEECH RECOGNITION SYSTEM FOR ISOLATED MANDARINE SYLLABLES(1993) ;CHANG, SG ;CHEN, SH ;電信工程研究所Institute of Communications EngineeringItem type:Item, APPLICATION OF A GENERALIZED PROBABILISTIC DESCENT METHOD TO RECURRENT NEURAL NETWORK BASED SPEECH RECOGNITION(1994) ;CHEN, SH ;LIAO, YF ;CHEN, WY ;交大名義發表National Chiao Tung UniversityItem type:Item, A PROSODIC MODEL OF MANDARIN SPEECH AND ITS APPLICATION TO PITCH LEVEL GENERATION FOR TEXT-TO-SPEECH(1995) ;HWANG, SH ;CHEN, SH ;電信工程研究所Institute of Communications EngineeringItem type:Item, AUTORADIOGRAPHIC STUDY OF PROSTAGLANDIN-E1 AND-OR ITS METABOLITES IN MOUSE UTERUS TISSUE(1976-01-01) ;CHEN, SH ;電子物理學系Department of ElectrophysicsItem type:Item, LIGHT-REFLECTION IN CHOLESTERIC MIXTURES(1977) ;CHEN, SH ;CHOU, LS ;電子物理學系Department of ElectrophysicsItem type:Item, CHEMICAL POTENTIAL AND MAGNETIC-SUSCEPTIBILITY OF A 2-SITE HUBBARD HAMILTONIAN WITH ARBITRARY ELECTRON-DENSITY(1976-01-01) ;CHENG, YC ;CHEN, SH ;電子物理學系Department of ElectrophysicsItem type:Item, MOLECULAR TWISTING POWER OF CHOLESTERYL PROPIONATE, NONANOATE AND MYRISTATE(1981) ;CHEN, SH ;CHOU, LS ;交大名義發表 ;電子物理學系National Chiao Tung University