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Formation Mechanism of Porous Cu3Sn Intermetallic Compounds by High Current Stressing at High Temperatures in Low-Bump-Height Solder Joints
(2016-01-01)
Lin, Jie-An
;
Lin, Chung-Kuang
;
Liu, Chen-Min
;
Huang, Yi-Sa
;
Chen, Chih
Electromigration tests of SnAg solder bump samples with 15 m bump height and Cu under-bump-metallization (UBM) were performed. The test conditions were 1.45 x 10(4) A/cm(2) at 185 degrees C and 1.20 x 10(4) A/cm(2) at 0 degrees C. A porous Cu3Sn intermetallic compound (IMC) structure was observed to form within the bumps after several hundred hours of current stressing. In direct comparison, annealing alone at 185 degrees C will take more than 1000 h for porous Cu3Sn to form, and it will not form at 170 degrees C even after 2000 h. Here we propose a mechanism to explain the formation of this porous structure assisted by electromigration. The results show that the SnAg bump with low bump height will become porous-type Cu3Sn when stressing with high current density and high temperature. Polarity effects on porous Cu3Sn formation is discussed.
Effect of grain orientations of Cu seed layers on the growth of < 111 >-oriented nanotwinned Cu
(2014-08-19)
Liu, Chien-Min
;
Lin, Han-Wen
;
Lu, Chia-Ling
;
Chen, Chih
;
材料科學與工程學系
We investigate the growth of Cu films on two different Cu seed layers: one with regular < 111 >-oriented grains and the other with very strong < 111 >-preferred orientation. It is found that densely-packed nanotwinned Cu (nt-Cu) can be grown by pulsed electroplating on the strong < 111 >-oriented Cu seed layer without a randomly-oriented transition layer between the nt-Cu and the Cu seed layer. The electroplated nt-Cu grow almost epitaxially on the seed layer and formed < 111 >-oriented columnar structures. However, with the regular < 111 >-oriented Cu seed, there is a randomly-oriented transition layer between the nt-Cu and the regular < 111 >-oriented Cu seed. The results indicate that the seed layer plays a crucial role on the regularity of < 111 >-oriented nanotwinned Cu.
Electromigration Mechanism of Failure in Flip-Chip Solder Joints Based on Discrete Void Formation
(2017-12-20)
Chang, Yuan-Wei
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Cheng, Yin
;
Helfen, Lukas
;
Xu, Feng
;
Tian, Tian
In this investigation, SnAgCu and SN100C solders were electromigration (EM) tested, and the 3D laminography imaging technique was employed for in-situ observation of the microstructure evolution during testing. We found that discrete voids nucleate, grow and coalesce along the intermetallic compound/solder interface during EM testing. A systematic analysis yields quantitative information on the number, volume, and growth rate of voids, and the EM parameter of DZ*. We observe that fast intrinsic diffusion in SnAgCu solder causes void growth and coalescence, while in the SN100C solder this coalescence was not significant. To deduce the current density distribution, finite-element models were constructed on the basis of the laminography images. The discrete voids do not change the global current density distribution, but they induce the local current crowding around the voids: this local current crowding enhances the lateral void growth and coalescence. The correlation between the current density and the probability of void formation indicates that a threshold current density exists for the activation of void formation. There is a significant increase in the probability of void formation when the current density exceeds half of the maximum value.
Low-temperature direct copper-to-copper bonding enabled by creep on (111) surfaces of nanotwinned Cu
(2015-05-12)
Liu, Chien-Min
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Lin, Han-Wen
;
Huang, Yi-Sa
;
Chu, Yi-Cheng
;
Chen, Chih
Direct Cu-to-Cu bonding was achieved at temperatures of 150-250 degrees C using a compressive stress of 100 psi (0.69 MPa) held for 10-60 min at 10(-3) torr. The key controlling parameter for direct bonding is rapid surface diffusion on (111) surface of Cu. Instead of using (111) oriented single crystal of Cu, oriented (111) texture of extremely high degree, exceeding 90%, was fabricated using the oriented nano-twin Cu. The bonded interface between two (111) surfaces forms a twist-type grain boundary. If the grain boundary has a low angle, it has a hexagonal network of screw dislocations. Such network image was obtained by plan-view transmission electron microscopy. A simple kinetic model of surface creep is presented; and the calculated and measured time of bonding is in reasonable agreement.
Correlation between the Microstructures of Bonding Interfaces and the Shear Strength of Cu-to-Cu Joints Using (111)-Oriented and Nanotwinned Cu
(2018-12-01)
Juang, Jing-Ye
;
Lu, Chia-Ling
;
Li, Yu-Jin
;
Tu, K. N.
;
Chen, Chih
Highly (111)-oriented Cu pillar-bumps were bonded to highly (111)-oriented Cu films at temperatures ranging from 200 degrees C/100 degrees C to 350 degrees C/100 degrees C in N-2 ambient conditions. The microstructures of the bonded interfaces affected the shear strength performance of the bonded Cu joints. The bonded interfaces at 300 degrees C/100 degrees C and 350 degrees C/100 degrees C had far fewer voids than interfaces bonded at 200 degrees C/100 degrees C and 250 degrees C/100 degrees C. In addition, grain growth took place across the bonding interfaces at temperatures above 300 degrees C/100 degrees C. The corresponding orientation map (OIM) showed the preferred orientation of large grown grains to be <100>. Shear tests revealed that the fracture mode was brittle for joints bonded at 200 degrees C/100 degrees C, but became ductile after bonded above 300 degrees C/100 degrees C. Based on the results, we found that voids and grain growth behavior play import roles in the shear strength performance of bonded Cu joints.
Fabrication of (111)-Oriented Nanotwinned Au Films for Au-to-Au Direct Bonding
(2018-11-01)
Wu, John A.
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Huang, Chih-Yang
;
Wu, Wen-Wei
;
Chen, Chih
;
材料科學與工程學系
We reported that highly (111)-oriented nanotwinned gold can be fabricated by periodical-reverse electroplating. The as-deposited films are shown to have a strong (111) preferred orientation, increasing with the reverse current time. The ratios of I-(111)/I-(220) and I-(111)/I-(200) in X-ray diffraction signals indicates a strong (111) preferred orientation. Using the advantage of the fast surface diffusion of (111) plane compared to the other planes of gold, we performed direct bonding with different thicknesses. Grain growth was observed over two films' interfaces to eliminate the bonding interface, when annealed at 250 degrees C for 1 h. Shear tests were performed to gain insight on the bonding quality. All the chips failed at either the silicon substrate or substrate-adhesion layer, showing possible higher strength than the tested maximum, 40.8 MPa.
Fast phase transformation due to electromigration of 18 mu m microbumps in three-dimensional integrated-circuit integration
(2014-12-15)
Chang, Y. W.
;
Chen, Chih
;
Chang, T. C.
;
Zhan, C. J.
;
Juang, J. Y.
The electromigration behavior was investigated in 18-mu m SnAg microbumps at 150 degrees C. The monitored resistance increase abruptly soon after the current stressing of 4.6 x 10(4) A/cm(2) was applied but the resistance rose much slower after a certain period of time. The formation of the high-resistivity Ni3Sn4 intermetallic compounds (IMCs) was responsible for the abrupt resistance increase in the beginning of the current stressing. The whole solder joint was transformed into an IMC joint. Because IMC has a higher electromigration resistance than the solder, a much slower increase in resistance was resulted after the solder joint was transformed into IMCs. (C) 2014 Elsevier B.V. All rights reserved.
Extremely anisotropic single-crystal growth in nanotwinned copper
(2014-10-01)
Lu, Chia-Ling
;
Lin, Han-Wen
;
Liu, Chien-Min
;
Huang, Yi-Sa
;
Lu, Tien-Lin
By electroplating of nearly unidirectionally < 111 >-oriented nanotwinned and fine-grained Cu on a Si wafer surface followed by annealing at 400-500 degrees C for up to 1 h, we grew many extremely large < 100 >-oriented single crystals of Cu with sizes ranging from 200 to 400 mu m. By patterning and annealing the nanotwinned Cu films, we grew an array of < 100 >-oriented single crystals of Cu with sizes ranging from 25 to 100 mu m on Si. In comparison, single-crystal nano-wire growth is a one-dimensional anisotropic growth process, in which the growth along the axial direction is much faster than in the radial direction. We report here a bulk-type two-dimensional crystal growth of an array of numerous < 100 >-oriented single crystals of Cu on Si. This growth process has the potential for microbump applications in three-dimensional integrated circuit-packaging technology for hand-held consumer electronic products.
Process for protecting solder joints and structure for alleviating electromigration and joule heating in solder joints
(2006-02-09)
Chen, Chih
;
Yeh, Everett Chang-Ching
;
Tu, King-Ning
This invention provides a process for protecting solder joints, comprising forming an UBM or pad metallurgy in solder joints and then further forming a small solder bump on UBM or pad metallurgy between substrate and chip. Wherein a material of high electric resistance is coated at the ends of UBM or pad metallurgy where substrate is connected to chip, as to equalize the current distribution of solder bump, therefore the electromigration resistance of solder joints is improved by suppressing the current crowding and joule heating phenomenon.
Measurement of electromigration activation energy in eutectic SnPb and SnAg flip-chip solder joints with Cu and Ni under-bump metallization
(2010-09-01)
Chen, Hsiao-Yun
;
Chen, Chih
;
材料科學與工程學系
;
Department of Materials Science and Engineering
Electromigration activation energy is measured by a built-in sensor that detects the real temperature during current stressing. Activation energy can be accurately determined by calibrating the temperature using the temperature coefficient of resistivity of an Al trace. The activation energies for eutectic SnAg and SnPb solder bumps are measured on Cu under-bump metallization (UBM) as 1.06 and 0.87 eV, respectively. The activation energy mainly depends on the formation of Cu-Sn intermetallic compounds. On the other hand, the activation energy for eutectic SnAg solder bumps with Cu-Ni UBM is measured as 0.84 eV, which is mainly related to void formation in the solder.

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