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Item type:Item, Fabrication of soft reflective microoptical elements using a replication process(2008-01-01) ;Shih, Teng-Kai ;Ho, Jeng-Rong ;Wang, Jui-Hao ;Chen, Chia-FuLiu, Chueh-YangThis paper reports the fabricated method and optical performance of soft, reflective elements with nonspherical surface. Based on excimer laser microdrilling and spin coating processes, a PMMA film suspended on microdrilled holes was used as a concave mold. Then, a high-reflectance material, mixed PDMS rubber polymers with TiO2 nanoscale powders, was cast on the PMMA mold. Finally, both of concave and convex elements could be fabricated through soft replica molding processes and these elements could directly reflect light without the deposition of metal coatings. Therefore, we proposed a model regarding a flexible cable with its weight suspended on fixed points to explain the formation mechanism of PMMA molds. With the change of diameters of microholes and thicknesses of PMMA films, the suspended height of films was surely controllable. Therefore, the curvature radiuses and shapes of these aspherical elements also depended on the diameters of microholes and the thicknesses of PMMA films. Experimental results demonstrated that soft reflective elements have good surface qualities and high-quality optical properties. Besides, all fabrication steps can be executed in ambient environment and at low temperature, the proposed method has a potential for mass production. (C) 2007 Elsevier B.V. All rights reserved.Item type:Item, Fabrication of optical gratings by shrinkage of a rubber material(2008-06-30) ;Shih, Teng-Kai ;Ho, Jeng-Rong ;Liao, Hung-Yu ;Chen, Chia-FuLiu, Chueh-YangOrdered wavy surface structures generated by deposition of a metal thin film on a pre-stretched PDMS plate were fabricated and its potential application for optical gratings was proposed. The orientation of the generated structures was always perpendicular to the pre-stretched direction and the pitch of the structure could be adjusted ranging from 4.5 mu m to 6.8 mu m by controlling the strength of the pre-stretched strain and the thickness of the surface metal film. Based on these periodic structures, various optical gratings were demonstrated. With a slight modification of the fabrication scheme, gratings with different orientations can be fabricated on both sides of the PDMS plate, the double-sided gratings, could be fabricated. It is believed the current method has the potential for the fabrication of a large-scale diffractive grating at lower costs. (C) 2007 Elsevier B.V. All rights reserved.Item type:Item, Improve GaAs Solar Cells Efficiency by Using High-transmittance Textured PDMS Film(2013) ;Han, H. V. ;Chen, H. C. ;Lin, C. C. ;Tsai, Y. L.Kuo, H. C.We demonstrate the GaAs solar cells which utilize the high-transmittance textured polydimethylsiloxane (PDMS) film can outstanding increase the short circuit current density and power conversion efficiency of solar cells. The transmittance of PDMS film is exceeded 90%, which can pass through almost all the light of GaAs Solar cells can be absorbed. We used a special imprint technology to let the PDMS film possess a highly textured surface. Then we measured the characteristics of textured PDMS film and found out that it has a very excellent Haze performance. The effect of flexible textured PDMS film on the suppression of surface reflection in GaAs solar cells is also investigated. The presented technology provides an inexpensive surface anti-reflection process, which can potentially replace typically complex anti-reflection coating (ARC) layer. The GaAs solar cells with textured PDMS layer can effectively enhance the short-circuit current density from 22.91 to 26.54 mA/cm(2) and the power conversion efficiency from 18.28 to 21.43 %, corresponding to a 17 % enhancement compared to the one without textured PDMS. The open-circuit voltage (V-oc) and the fill-factor (FF) of GaAs solar cells exhibit negligible change, because the textured PDMS film was pasted up on the surface of GaAs solar cells and did not interfere with the diode operation. At the same time, we observed through the EQE measurement that the textured PDMS film not only proved wonderful light scattering effect but also generated more electron-hole pairs in all absorption spectrum range. Finally, through this simple PDMS process, we believe this technology shall be a great candidate for next generation of highly efficient and low-cost photovoltaic devices.Item type:Item, A Low-Power Bio-Potential Acquisition System with Flexible PDMS Dry Electrodes for Portable Ubiquitous Healthcare Applications(2013-03-01) ;Chen, Chih-Yuan ;Chang, Chia-Lin ;Chang, Chih-Wei ;Lai, Shin-ChiChien, Tsung-FuThis work describes a bio-potential acquisition system for portable ubiquitous healthcare applications using flexible polydimethylsiloxane dry electrodes (FPDEs) and a low-power recording circuit. This novel FPDE used Au as the skin contact layer, which was made using a CO2 laser and replica method technology. The FPDE was revised from a commercial bio-potential electrode with a conductive snap using dry electrodes rather than wet electrodes that proposed reliable and robust attachment for the purpose of measurement, and attaching velcro made it wearable on the forearm for bio-potential applications. Furthermore, this study proposes a recording device to store bio-potential signal data and provides portability and low-power consumption for the proposed acquisition system. To acquire differential bio-potentials, such as electrocardiogram (ECG) signals, the proposed recording device includes a low-power front-end acquisition chip fabricated using a complementary metal-oxide-semiconductor (CMOS) process, a commercial microcontroller (MSP430F149), and a secure digital (SD) card for portable healthcare applications. The proposed system can obtain ECG signals efficiently and are comfortable to the skin. The power consumption of the system is about 85 mW for continuous working over a 3 day period with two AA batteries. It can also be used as a compact Holter ECG system.Item type:Item, A novel thermal switch and variable capacitance implement by CMOS MEMS process approaching in micro electrostatic converter(2012-11-01) ;Chiou, Jin-Chern ;Chou, Lei-Chun ;Lai, You-Liang ;Huang, Sheng-Chieh電控工程研究所This paper focuses on implementing a novel thermal switch and variable capacitance design by using commercially available CMOS MEMS process which can approach in a micro electrostatic converter system. In this system, there are two major parts. First is the variable capacitance, and the second is the thermal switch. In the variable capacitance, it implement by UMC 0.18 mu m one-poly seven-metal (1P7M) CMOS MEMS process. In the post process, the silicon-oxidation has been released and the gap between two metal layers filled with PDMS (Polydimethylsiloxane). Filling with PDMS is to significantly increase C-max. In the thermal switch design, there are two novel designs in this switch: first, the soft contact structure and post-processing fabrication; second, using residual stress to achieve large structural deformation and a new design of thermal switch. To create the soft contact structure, residual stress effect has been utilized to make different bending curvatures. According to the experiments, the layer metal 1 has the largest residual stress [1] effect that can achieve the largest deflection in z-axis. Because the residual stress of the layer metal 1 is negative, the structure will bend down after release, the largest contact area which has been set up to get the lowest contact miss ability. In the post-processing fabrication, 0.3 mu m thickness gold will be patterned on the contact tips. Due to gold, rather than Aluminum, has no oxidation issue, it has more reliability on preventing the problem of oxidation than Aluminum. In the new thermal actuator design, we design a novel folded-flexure [2,3] with the electro-thermal excitation to turn the switch on or off. In the prototype, the device size is 500 mu m x 400 mu m and the gap between two contact pads is 9 mu m in off-state. Depending on the experimental results, the C-max is 19.22 nF, and the C-min is 10.65 nF in variable capacitance. The switch can work stably at 3 V. and the working temperature and operating bandwidth are individually 20-200 degrees C. The natural frequency of the switch is 42.9 kHz and the response time is 14.28 Hz. (c) 2012 Elsevier Ltd. All rights reserved.Item type:Item, Enhancement of power conversion efficiency in GaAs solar cells with dual-layer quantum dots using flexible PDMS film(2012-09-01) ;Chen, Hsin-Chu ;Lin, Chien-Chung ;Han, Hau-Vei ;Chen, Kuo-JuTsai, Yu-Lin"This study demonstrates the high performance of GaAs solar cells with dual-layer CdS quantum dots (QDs) carried by flexible polydimethylsiloxane (PDMS) film. Several parameters were enhanced, including the short circuit current, fill factor, and power conversion efficiency, which were measured under white light illumination similar to the solar spectrum. The flexible PDMS film was fabricated using the spin-coating technique, and was then used to embed dual-layer CdS QDs. Different concentrations of QDs were applied in this design to test the optimal combination. The proposed scheme enhances power conversion efficiency by 22%, compared to a GaAs solar cell without CdS QDs. The photon down-conversion capability in the ultraviolet (UV) range and additional antireflection capability in the longer visible-IR range were verified through the external quantum efficiency. (C) 2012 Elsevier B.V. All rights reserved."Item type:Item, Fabrication of PDMS (polydimethylsiloxane) microlens and diffuser using replica molding(2006-11-01) ;Shih, Teng-Kai ;Chen, Chia-Fu ;Ho, Jeng-Rong ;Chuang, Fang-Tzu材料科學與工程學系This paper reports the fabrication method of PDMS (polydimethylsiloxane) microlens array based on the replica molding process, casting a liquid PDMS into concave microlens molds. Concave microlens molds were fabricated through spin-coating processes suspended a liquid PMMA film on the micro-drilled hole, leading to the formation of the special curvature. Then, PDMS microlens arrays and diffusers were fabricated by replica molding and discussed in this study. The fabricated microlenses have both good surface roughness and high-quality optical properties. Therefore, diffusers were fabricated by two-step replica molding. A high-intensity He-Ne laser beam was uniformly spread through diffusers. Experimental tests demonstrated that all PDMS elements are successfully fabricated by replica molding process and operated during optical measurement. (c) 2006 Elsevier B.V. All rights reserved.Item type:Item, Study of leading factors in formation of surface wavy structures on a rubber material(2006-12-15) ;Shih, Teng-Kai ;Chen, Chia-Fu ;Ho, Jeng-Rong ;Liu, Chueh-YangChuang, Fang-TzuWavy structures are often observed on the surface of a rubber material (polydimethylsiloxane, PDMS) covered with a thin metallic film. In this study we demonstrate that the orientation, periodicity, location of formation, and range of periodicity of the wavy structures can be regulated by three leading factors including the surface pattern, substrate hardness and the thickness of the metallic film. Results show the orientation of the wavy structures can be adjusted by the location, shape and size of the surface patterns. Enhancement of the substrate hardness can prevent forming random wavy structures. The thickness of surface metallic film significantly influenced the periodicity of the structures. Experimental results revealed an increase of the thickness of surface Au film by 50 nm, the periodicity was increased roughly by 1 mu m. A compound structure, combining longitudinally preset patterns and transversely induced wavy structures, and a parallel wavy structure fabricated, respectively, by suitable arrangement of pattern configurations and adjustment of substrate hardness were demonstrated. The relatively simple approaches proposed here show the potential application in fabrication of designated complicate structures. (c) 2006 Elsevier B.V. All rights reserved.Item type:Item, Topographic control on silicone surface using chemical oxidization method(2007-10-15) ;Shih, Teng-Kai ;Ho, Jeng-Rong ;Chen, Chia-Fu ;Whang, Wha-TzongChen, Chien-ChungThe paper describes a wet process for modifying the surface of polydimethylsiloxane (PDMS) using H2SO4/HNO3 solutions. The oxidation on the surface of PDMS was confirmed by the examinations of Fourier transform infrared spectrometry (FTIR), contact angle of water drop and X-ray photoelectron spectroscopy (XPS). The hydrophobic surface of pristine PDMS was not only changed to hydrophilic, but also formed wrinkles on it after chemical modification. Bilayer systems, stiff oxidized PDMS layers were capped on soft PDMS foundations, would generate easily compressive stresses due to the large difference in volumetric contraction rates and led to form wrinkles on the surface. Experimental results demonstrated the periodicity of wrinkles was controllable by controlling the duration of oxidation. Therefore, wrinkles could be arranged orderly by the guidance of external forces before oxidization. The potential technology for generating and ordering wrinkles on the PDMS surface is valuable in the applications of pressure sensors, biology, micro-optics and nano-/micro-fabrication in the future. (C) 2007 Elsevier B.V. All rights reserved.Item type:Item, Fabrication of optical reflectors by using of elastomer with self-organized undulations(2008-08-01) ;Wang, Jui-Hao ;Shih, Teng-Kai ;Chen, Chia-Fu ;Chen, Kuang-ChungChen, Chien-ChungBack-surface diffusive reflectors have been widely applied in many optical systems to promote the efficiency used in system. In this work, we propose a novel way to fabricate a soft diffusive reflector by using of silicone (polydimethylsiloxane, PDMS). High-reflectance substrates were first fabricated by mixing nanoscaled TiO2 powders with PDMS polymers, and then microscale wave-like undulations were spontaneously developed after the substrates were dipped into H2SO4/HNO3 solutions. After optical examination, a TiO2/PDMS plate comprising microscale undulations, which can surely serve as a reflector, could reflect and diffuse light effectively. Besides, all fabrication processes can be executed in the ambient environment and at low temperature. This proposed method has a potential for mass production in the future. (c) 2008 Elsevier B.V. All rights reserved.