<link rel="stylesheet" href="styles.cf390c6bfbe7555f.css">

學術出版;;Publications

Permanent URI for this communityhdl:11536/1

收集所有交通大學研究人員與學生個人或團體所發表之各項學術著作，涵蓋期刊論文、教師專書、學位論文等項。;;Collections of Publications of NCTU Researchers and Students Like Journal Papers and Thesis.

Browse

Filters

19942

Settings

🏛️國立陽明交通大學機構典藏

Author: search.filters.author.CHEN, CFSubject: search.filters.subject.CHEMICAL VAPOR DEPOSITION

Search Results

Now showing 1 - 2 of 2
  • Thumbnail Image
    Item type:Item,
    STUDY OF THE LOSS OF PATTERN DEFINITION IN DIAMOND GROWTH
    (1994-12-15)
    CHEN, CF
    ;
    CHEN, SH
    ;
    交大名義發表
    ;
    材料科學與工程學系
    ;
    National Chiao Tung University
    Selectivity loss (i.e. deposition on a mirror-smooth finished silicon surface) during diamond film growth using a selective deposition technique was investigated. CH4-CO2 gas mixtures without supplying hydrogen were used to enhance the nucleation density. After pattern generation and ultrasonic agitation pretreatment, the Si substrates were dipped into a solution of HF:HNO3:H2O (1:1.1:10) for various lengths of time to increase the pattern definition during the second period of diamond film growth. It was found that the selectivity loss in the diamond films could be significantly reduced by increasing the dipping time. The nuclei formed in the nucleation step were etched using the above solution, which reduced the selectivity loss. Scanning electron microscopy and electron spectroscopy for chemical analysis were used to examine the selectivity loss and morphological change of the as-grown diamond films. It was also found that a higher CH4 concentration resulted in a high selective loss of diamond growth.
  • Thumbnail Image
    Item type:Item,
    OPTICAL CHARACTERIZATION OF DIAMOND SYNTHESIZED USING CH4-CO2 GAS-MIXTURES WITHOUT SUPPLYING HYDROGEN GAS
    (1994-12-15)
    CHEN, CF
    ;
    CHEN, SH
    ;
    HONG, TM
    ;
    LEU, JS
    ;
    交大名義發表
    Diamond films are the optical choice for IR window applications. Polycrystalline diamond films were synthesized in this study by microwave-plasma-assisted chemical vapour deposition (PACVD) using CH4 + CO2 as reactive gases. The primary purpose of this study is to determine the effect of the deposition conditions on the optical properties of PACVD diamond films. Room temperature optical properties of free-standing diamond films were studied by Fourier transform IR spectroscopy. Experimental results indicate that the refractive index of diamond films is comparable with that of natural diamond. The scattering loss caused by the rough surface of as-grown diamond film was reduced using a two-step process and polishing techniques. The resulting reduction in scattering loss increased the transmission intensity. For low temperature deposited diamond film the intensity of absorption due to carbon-hydrogen stretch bands was higher than that for film deposited at a high temperature. IR spectra are fitted with simulated spectra to determine the background absorption caused by the amorphous carbon contained in the films. Additionally, the background absorption of low temperature deposited diamond film was found to be larger than that of a diamond film deposited at 850 degrees C.