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收集所有交通大學研究人員與學生個人或團體所發表之各項學術著作，涵蓋期刊論文、教師專書、學位論文等項。;;Collections of Publications of NCTU Researchers and Students Like Journal Papers and Thesis.

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Author: search.filters.author.Chen, HGSubject: search.filters.subject.bias growth

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    The orientation effect of silicon grains on diamond deposition
    (2005-11-01)
    Su, YH
    ;
    Chang, L
    ;
    Chen, HG
    ;
    Yan, JK
    ;
    Chou, T
    Diamond deposition on mirror-polished polycrystalline silicon substrates which have grains in various orientations has been investigated using electron backscatter diffraction (EBSD) method with scanning electron microscopy (SEMI). Diamond was deposited by microwave plasma chemical vapor deposition with application of a negative bias voltage oil the substrate. The evidence from systematic SEM observations shows that silicon orientation determined by EBSD has a strong effect on diamond nucleation. In general, the diamond nucleation density on Si grains oriented close to < 100 > is the highest, while it is the lowest for those grains close to < 111 >, under the same experimental conditions for deposition. The same phenomena have been observed in the range of methane concentration from 2% to 4% in hydrogen. (c) 2005 Elsevier B.V. All rights reserved.