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Item type:Item, Comparison of MONOS memory device integrity when using Hf(1-x-y)N(x)O(y) trapping layers with different N compositions(2008-06-01) ;Yang, H. J. ;Cheng, C. F. ;Chen, W. B. ;Lin, S. H.Yeh, F. S.We have studied the nitrogen composition dependence of the characteristics of TaN/HfLaON/Hf(1-x-y)N(x)O(y)/ SiO(2)/Si MONOS memory devices. By increasing the N composition in the Hf(1-x-y)N(x)O(y) trapping layer, both the memory window And high-temperature retention improved. The Hf(0.3)N(0.2)O(0.5) MONOS device displayed good characteristics in terms of its +/-9-V program/erase (P/E) voltage, 100-mu s P/E speed, large initial 2.8-V memory window, and a ten-year extrapolated retention of 1.8 V at 85 degrees C or 1.5 V at 125 degrees C.Item type:Item, Improving the retention and endurance characteristics of charge-trapping memory by using double quantum barriers(2008-07-01) ;Lin, S. H. ;Yang, H. J. ;Chen, W. B. ;Yeh, F. S.McAlister, Sean P.We have studied the performance of double-quantum-barrier [TaN - Ir(3)Si] - [HfAlO - LaAlO(3)] - Hf(0.3)N(0.2)O(0.5) - [HfAlO - SiO(2)]-Si charge-trapping memory devices. These devices display good characteristics in terms of their +/- 9-V program/erase (P/E) voltage, 100-mu s P/E speed, initial 3.2-V memory window, and ten-year extrapolated data retention window of 2.4 V at 150 degrees C. The retention decay rate is significantly better than single-barrier MONOS devices, as is the cycled retention data, due to the reduced-interface trap generation.